Type T3BIB

The MKS Type T3BI Intelligent Exhaust Throttle Valve is specifically designed for applications where a simple pressure control system is desired. The T3BI integrates all control, communication, and driver circuits within a Throttle Valve assembly, thereby
eliminating the need for mounting a separate pressure control electronics module. The self-tuning control algorithm and high speed operation drives the system to set point fast and with minimum overshoot, and ensures repeatable process recipes without operator
involvement.